|University||Nanyang Technological University (NTU)|
Refer to Figure, the vacuum system is designed for vapor deposition in the
- How many pumps will you be using for your vacuum system and explain your
answer? Name the pumps used. What type of vacuum system is this?
- Determine the Mean Free Path (MFP) of the gas molecules in the system.
- Identify the gas flow regime that is in the vacuum system. Explain your answer.
- The conductance of a pipe will differ in the various flow regimes. Using the
appropriate conductance formula, determine the conductance for each section of the pipelines A, B, C, D, E, and F in liters/sec.
- With all the valves opened, calculate the effective pumping speed at the chamber in liters/sec.
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