How many pumps will you be using for your vacuum system and explain your answer? Name the pumps used: Vacuum Technology Assignment, NTU, Singapore

Refer to Figure, the vacuum system is designed for vapor deposition in the
chamber.

• How many pumps will you be using for your vacuum system and explain your
  answer? Name the pumps used. What type of vacuum system is this?
• Determine the Mean Free Path (MFP) of the gas molecules in the system.
• Identify the gas flow regime that is in the vacuum system. Explain your answer.
• The conductance of a pipe will differ in the various flow regimes. Using the
  appropriate conductance formula, determine the conductance for each section of the pipelines A, B, C, D, E, and F in liters/sec.
• With all the valves opened, calculate the effective pumping speed at the chamber in liters/sec.